Microfabricated sensor platform with through-glass vias for...

Sensors and Actuators A: Physical 2018 / 08 Vol. 278

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, Corinna, Abo Ras, Mohamad, Varpula, Aapo, Grigoras, Kestutis, May, Daniel, Wunderle, Bernhard, Chapuis, Pierre-Olivier, Gomès, Séverine, Prunnila, Mika
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Volume:
278
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.05.030
Date:
August, 2018
File:
PDF, 2.21 MB
english, 2018
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