Finite Element Analysis of Temperature Field of...

IOP Conference Series Materials Science and Engineering 2018 / 03 Vol. 322

Finite Element Analysis of Temperature Field of Electromagnetic Heating in Nitride MOCVD Reaction Chamber

Hu, Shigang, Wu, Qingyang, Li, Jin, Cao, Huiyi, Zhang, Yanan, Li, Zhiming
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Volume:
322
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/322/2/022006
Date:
March, 2018
File:
PDF, 236 KB
english, 2018
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