Matrix and element dependences of useful yield in Si and...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 05 Vol. 36; Iss. 3

Matrix and element dependences of useful yield in Si and SiO 2 matrices using laser-ionization sputtered neutral mass spectrometry

Saito, Reiko, Akutsu, Haruko, Asakawa, Jun, Takeno, Shiro, Kiyokawa, Kei, Nagashima, Satoru, Ishikawa, Takeharu, Kashiwagi, Takahiro, Takano, Akio, Sakamoto, Tetsuo, Fujii, Masaaki
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5018092
Date:
May, 2018
File:
PDF, 882 KB
english, 2018
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