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Microsystem Technologies 2018 / 6

Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure

Liu, Cong, Froemel, Joerg, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3984-1
Date:
June, 2018
File:
PDF, 1.82 MB
english, 2018
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