Mechanical properties of silicon in subsurface damage layer from nano-grinding studied by atomistic simulation
Zhang, Zhiwei, Chen, Pei, Qin, Fei, An, Tong, Yu, HuipingVolume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5021654
Date:
May, 2018
File:
PDF, 11.28 MB
english, 2018