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Self-contained in-vacuum in situ thin film stress measurement tool
Reinink, J., van de Kruijs, R. W. E., Bijkerk, F.Volume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5021790
Date:
May, 2018
File:
PDF, 3.85 MB
english, 2018