Analytical Modeling and Experimental Verification of...

Journal of Microelectromechanical Systems 2018 / 6 Vol. 27; Iss. 3

Analytical Modeling and Experimental Verification of Nonlinear Mode Coupling in a Decoupled Tuning Fork Microresonator

Sarrafan, Atabak, Bahreyni, Behraad, Golnaraghi, Farid
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Volume:
27
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2830770
Date:
June, 2018
File:
PDF, 2.66 MB
english, 2018
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