Packaging of Optical MEMS Devices

Packaging of Optical MEMS Devices

Low, Yee L., Scotti, Ronald E., Ramsey, David A., Bolle, Cristian A., O’Neill, Steven P., Nguyen, Khanh C.
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Volume:
125
Year:
2003
Language:
english
Journal:
Journal of Electronic Packaging
DOI:
10.1115/1.1535933
File:
PDF, 926 KB
english, 2003
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