Packaging of Optical MEMS Devices
Low, Yee L., Scotti, Ronald E., Ramsey, David A., Bolle, Cristian A., O’Neill, Steven P., Nguyen, Khanh C.Volume:
125
Year:
2003
Language:
english
Journal:
Journal of Electronic Packaging
DOI:
10.1115/1.1535933
File:
PDF, 926 KB
english, 2003