P-18: Improvement of Reliability in Coplanar a-IGZO TFTs by...

SID Symposium Digest of Technical Papers 2018 / 05 Vol. 49; Iss. 1

P-18: Improvement of Reliability in Coplanar a-IGZO TFTs by Multilayer SiO 2 Gate Insulator

Park, Se Hee, Park, Jae Yoon, Yun, Pil Sang, Bae, Jong Uk, Park, Kwon-Shik, Yoon, SooYong, Kang, Inbyeong
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Volume:
49
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.12136
Date:
May, 2018
File:
PDF, 1.16 MB
english, 2018
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