Effect of Ar addition on uniformity of diamond growth by...

Effect of Ar addition on uniformity of diamond growth by using microwave plasma chemical vapor deposition

Yamada, Hideaki, Chayahara, Akiyoshi, Mokuno, Yoshiaki
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Volume:
87
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2018.05.017
Date:
August, 2018
File:
PDF, 920 KB
english, 2018
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