Two-degrees-of-freedom piezo-driven fast steering mirror...

Review of Scientific Instruments 2018 / 05 Vol. 89; Iss. 5

Two-degrees-of-freedom piezo-driven fast steering mirror with cross-axis decoupling capability

Shao, Shubao, Tian, Zheng, Song, Siyang, Xu, Minglong
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Volume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5001966
Date:
May, 2018
File:
PDF, 5.07 MB
english, 2018
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