[IEEE 2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Lviv, Ukraine (2018.4.18-2018.4.22)] 2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) - 3D MOS-transistor elements in smart-sensors based on SOI-structures
Druzhinin, Anatoly, Khoverko, Yuriy, Kogut, Igor, Holota, VictorYear:
2018
Language:
english
DOI:
10.1109/MEMSTECH.2018.8365689
File:
PDF, 776 KB
english, 2018