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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Design and implementation of high fill-factor structures for low-cost CMOS microbolometers
Erturk, Ozan, Akin, TayfunYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346649
File:
PDF, 422 KB
english, 2018