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A rasterization method for generating exposure pattern images with optical maskless lithography
Lee, Jinwon, Lee, Hyungku, Yang, JeongsamVolume:
32
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-018-0431-2
Date:
May, 2018
File:
PDF, 7.56 MB
english, 2018