Arsenic redistribution induced by low-temperature Ni silicidation at 450°C on shallow junctions
Yu-Long Jiang, Guo-Ping Ru, Xin-Ping Qu, Bing-Zong Li, Aditya Agarwal, John Poate, Khalid Hossain, Wayne HollandVolume:
35
Year:
2006
Language:
english
Pages:
4
DOI:
10.1007/bf02692550
File:
PDF, 254 KB
english, 2006