On-site SiH 4 generator using hydrogen plasma generated in slit-type narrow gap
Takei, Norihisa, Shinoda, Fumiya, Kakiuchi, Hiroaki, Yasutake, Kiyoshi, Ohmi, HiromasaVolume:
51
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aac2ae
Date:
June, 2018
File:
PDF, 1.23 MB
english, 2018