A Silicon-Embedded Inductor Surrounded by Porous Silicon for Improved Quality Factor
Wu, Rongxiang, Liao, Niteng, Sin, Johnny K. O., Bardet, Benjamin, Billoué, Jérôme, Gautier, GaëlVolume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0141806jss
File:
PDF, 617 KB
english, 2018