Preparations of silica slurry for wafer polishing via controlled growth of commercial silica seeds
Jae-Hyun So, Sun Hyuk Bae, Seung-Man Yang, Do Hyun KimVolume:
18
Language:
english
Pages:
8
DOI:
10.1007/bf02698304
Date:
July, 2001
File:
PDF, 1.90 MB
english, 2001