MEMS Electret Energy Harvester with Embedded Bistable...

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Journal of Micromechanics and Microengineering 2018 / 05

MEMS Electret Energy Harvester with Embedded Bistable Electrostatic Spring for Broadband Response

Murotani, Kazuya, Suzuki, Yuji
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Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aac8cc
Date:
May, 2018
File:
PDF, 1.28 MB
english, 2018
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