A study of deposition rate and characterization of bn thin films prepared by cvd
Yong-Gi Jin, Sang-Yeol Lee, Young-Woo Nam, Joong Kee Lee, Dalkeun ParkVolume:
15
Language:
english
Pages:
6
DOI:
10.1007/bf02698993
Date:
November, 1998
File:
PDF, 1.26 MB
english, 1998