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[ASME 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems - Clear Water Bay, Kowloon, Hong Kong (Tuesday 3 June 2008)] 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems - Optical Feedback Interferometry and Its Application in MEMS Sensing
Liu, Huilan, Wang, Yong, Pan, Zaiyou, Feng, LishuangYear:
2008
Language:
english
DOI:
10.1115/MicroNano2008-70137
File:
PDF, 462 KB
english, 2008