Evaluation of citric acid added cleaning solution for...

Korean Journal of Chemical Engineering 2001 / 05 Vol. 18; Iss. 3

Evaluation of citric acid added cleaning solution for removal of metallic contaminants on Si wafer surface

Hye-Young Chung, Kyung-Soo Kim, Hyo-Yong Cho, Bo-Young Lee, Hak-Do Yoo, Sang-Hak Lee
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Volume:
18
Language:
english
Pages:
5
DOI:
10.1007/bf02699175
Date:
May, 2001
File:
PDF, 610 KB
english, 2001
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