‘Spin-on glass’ films for semiconductor technology

Surface Coatings International Part B: Coatings Transactions 2003 / 09 Vol. 86; Iss. 3

‘Spin-on glass’ films for semiconductor technology

OA Shilova
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
86
Language:
english
Pages:
8
DOI:
10.1007/bf02699653
Date:
September, 2003
File:
PDF, 3.24 MB
english, 2003
Conversion to is in progress
Conversion to is failed