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Mechanical Stress Distribution and the Effects of Process Parameter Changes in Vertical NAND Flash Memory
Namkoong, Yeon, Yang, Hyung Jun, Song, Yun HeubVolume:
17
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2017.13739
Date:
July, 2017
File:
PDF, 10.78 MB
english, 2017