High Rate Deposition of Microcrystalline Silicon Solar...

MRS Proceedings 2002 Vol. 715

High Rate Deposition of Microcrystalline Silicon Solar Cells Using 13.56 MHz PECVD – Prerequisites and Limiting Factors

Roschek, Tobias, Repmann, Tobias, Kluth, Oliver, Müller, Joachim, Rech, Bernd, Wagner, Heribert
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Volume:
715
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-715-A26.5
File:
PDF, 92 KB
english, 2002
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