Theoretical Modeling of the Morphological Evolution of Thin Films During Deposition Processes
Li, Kun-Dar, Huang, Po-Yu, Dong, Yu-WeiVolume:
17
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2017.13790
Date:
August, 2017
File:
PDF, 8.55 MB
english, 2017