Computation of flow and thermal fields in a model CVD...

Sadhana 2002 / 12 Vol. 27; Iss. 6

Computation of flow and thermal fields in a model CVD reactor

Vishwadeep Saxena, K. Muralidhar, V. Eswaran
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Volume:
27
Language:
english
Pages:
17
DOI:
10.1007/bf02703357
Date:
December, 2002
File:
PDF, 363 KB
english, 2002
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