![](/img/cover-not-exists.png)
Effect of Homo-buffer Layers on the Properties of Sputtering Deposited Ga 2 O 3 Films
Huang, Jian, Li, Bing, Ma, Yuncheng, Tang, Ke, Huang, Haofei, Hu, Yan, Zou, Tianyu, Wang, LinjunVolume:
362
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/362/1/012003
Date:
May, 2018
File:
PDF, 947 KB
english, 2018