Monte Carlo modeling of radio-frequency breakdown in argon

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Plasma Sources Science and Technology 2018 / 06

Monte Carlo modeling of radio-frequency breakdown in argon

Puač, Marija, Maric, Dragana, Radmilovic-Radjenovic, Marija, Suvakov, Milovan, Petrovic, Zoran Lj
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Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aacc0c
Date:
June, 2018
File:
PDF, 1.99 MB
english, 2018
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