Thermodynamic analysis of liquid source chemical vapor deposition process for the preparation of a Ba-Sr-Ti oxide film
Yong Seok Cho, Sung-Il Cho, Jung-Shik Heo, Sang Heup MoonVolume:
21
Language:
english
Pages:
6
DOI:
10.1007/bf02705410
Date:
January, 2004
File:
PDF, 368 KB
english, 2004