Preparation and characterization of TiO2thin films by PECVD...

Korean Journal of Chemical Engineering 1996 / 09 Vol. 13; Iss. 5

Preparation and characterization of TiO2thin films by PECVD on Si substrate

In-Sun Lee, Jong-Wha Kim, Chang-Joo Youn, Sang-Kyu Park, Yoon-Bong Hahn
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Volume:
13
Language:
english
Pages:
5
DOI:
10.1007/bf02705996
Date:
September, 1996
File:
PDF, 622 KB
english, 1996
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