Origin and compensation of deposition errors in a broadband...

Thin Solid Films 2018 / 08 Vol. 660

Origin and compensation of deposition errors in a broadband antireflection coating prepared using quartz crystal monitoring

Dong, Siyu, Jiao, Hongfei, Bao, Ganghua, Zhang, Jinlong, Wang, Zhanshan, Cheng, Xinbin
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Volume:
660
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.05.044
Date:
August, 2018
File:
PDF, 1.25 MB
english, 2018
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