![](/img/cover-not-exists.png)
The properties of ZnO films obtained by high-frequency magnetron deposition with subsequent vacuum annealing and plasma treatment
Redka, D N, Elanskaia, K G, Bakhchova, L DVolume:
872
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/872/1/012047
Date:
July, 2017
File:
PDF, 717 KB
english, 2017