Measurement of doping profiles by a contactless method of...

Review of Scientific Instruments 2018 / 06 Vol. 89; Iss. 6

Measurement of doping profiles by a contactless method of IR reflectance under grazing incidence

Holovský, Jakub, Remeš, Zdeněk, Poruba, Aleš, Franta, Daniel, Conrad, Brianna, Abelová, Lucie, Bušek, David
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Volume:
89
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5015988
Date:
June, 2018
File:
PDF, 641 KB
english, 2018
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