Thermal Stability Improvement of Back Channel Etched a-IGZO TFTs by Using Fluorinated Organic Passivation
Park, Young Chul, Um, Jae Gwang, Mativenga, Mallory, Jang, JinVolume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0251806jss
File:
PDF, 965 KB
english, 2018