Characterization of Plasma Induced Damage and Strain on InP...

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MRS Advances 2018 / 5

Characterization of Plasma Induced Damage and Strain on InP Patterns and Their Impact on Luminescence

Fouchier, Marc, Fahed, Maria, Pargon, Erwine, Rochat, Névine, Landesman, Jean-Pierre, Rouchon, Denis, Roque, Joyce, Rovayaz, Karine, Martinez, Eugénie, Labau, Sébastien
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Language:
english
Journal:
MRS Advances
DOI:
10.1557/adv.2018.448
Date:
May, 2018
File:
PDF, 1.28 MB
english, 2018
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