Effect of rapid thermal annealing on bulk micro-defects and...

Materials Science in Semiconductor Processing 2018 / 10 Vol. 85

Effect of rapid thermal annealing on bulk micro-defects and plastic deformation in silicon during high temperature processing

Jung, Jung Gyu, Lee, Kisang, Lee, Boyoung, Lee, Ho Seong
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Volume:
85
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.06.003
Date:
October, 2018
File:
PDF, 621 KB
english, 2018
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