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Sensors and Actuators A: Physical 2018 / 6

Highly Sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology

Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Dao, Dzung Viet, Nguyen, Nam-Trung
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Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.06.025
Date:
June, 2018
File:
PDF, 2.37 MB
english, 2018
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