Precision micro-mechanical components in single crystal diamond by deep reactive ion etching
Toros, Adrien, Kiss, Marcell, Graziosi, Teodoro, Sattari, Hamed, Gallo, Pascal, Quack, NielsVolume:
4
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-018-0014-5
Date:
December, 2018
File:
PDF, 2.13 MB
english, 2018