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Plasma etching of organic material: Combined effects of charged and neutral species
Murillo, R., Poncin-Epaillard, F., Segui, Y.Volume:
37
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2007031
Date:
March, 2007
File:
PDF, 871 KB
english, 2007