[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) -...

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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - In-situ phosphorus doped ultra-high vacuum e-beam evaporated silicon for high gauge factor polysilicon

Chuang, Ian, Michael, Aron, Soeriyadi, Anastasia, Kwok, Chee Yee
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Year:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346737
File:
PDF, 700 KB
english, 2018
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