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Development of a capacitive slip sensor using internal air gap
Kim, Sung Joon, Baek, Seung Guk, Moon, Hyungpil, Choi, Hyouk Ryeol, Koo, Ja ChoonLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-3975-2
Date:
June, 2018
File:
PDF, 1.04 MB
english, 2018