Photoacid generator-polymer interaction on the quantum...

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Photoacid generator-polymer interaction on the quantum yield of chemically amplified resists for extreme ultraviolet lithography

Fallica, Roberto, Ekinci, Yasin
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Year:
2018
Language:
english
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/C8TC01446A
File:
PDF, 643 KB
english, 2018
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