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The impact of electrode materials on 1/f noise in piezoelectric AlN contour mode resonators
Kim, Hoe Joon, Jung, Soon In, Segovia-Fernandez, Jeronimo, Piazza, GianlucaVolume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5024961
Date:
May, 2018
File:
PDF, 1.70 MB
english, 2018