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Effect of the Flash Annealing on the Impurity Distribution and the Electronic Structure in the Inversion Layer
Sakata, Tomohiro, N. Takeda, Sakura, Idayu Ayob, Nur, Daimon, HiroshiVolume:
13
Year:
2015
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2015.75
File:
PDF, 432 KB
english, 2015