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A High Accuracy Grating Alignment Technique (1st Report)
IKI, Makoto, TAKEUCHI, Nobuyuki, UNE, Atsunobu, TORII, YasuhiroVolume:
53
Year:
1987
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.53.717
File:
PDF, 1.30 MB
english, 1987