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Precise Tool Positioning on Workpiece for Nano-machining (1st Report)
OBARA, Haruki, TOMITA, Yu, KAMON, Shinichi, SASAKI, Tohru, MORITA, Noboru, IKEMOTO, Yusuke, JINDAI, MitsuruVolume:
81
Year:
2015
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.81.339
File:
PDF, 1.92 MB
2015