Investigation of Slurry Flow Behavior in Chemical...

Investigation of Slurry Flow Behavior in Chemical Mechanical Polishing of Hard to Process Material

UNEDA, Michio, TOMIIE, Yuichi, HOTTA, Kazutoshi, TAMAI, Kazusei, MORINAGA, Hitoshi, ISHIKAWA, Ken-ichi
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Volume:
83
Year:
2017
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.83.756
File:
PDF, 2.35 MB
2017
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