Investigation of Slurry Flow Behavior in Chemical Mechanical Polishing of Hard to Process Material
UNEDA, Michio, TOMIIE, Yuichi, HOTTA, Kazutoshi, TAMAI, Kazusei, MORINAGA, Hitoshi, ISHIKAWA, Ken-ichiVolume:
83
Year:
2017
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.83.756
File:
PDF, 2.35 MB
2017