Microstructure of obliquely deposited thin film.

Microstructure of obliquely deposited thin film.

Motohiro, Tomoyoshi, Noda, Shoji
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Volume:
37
Year:
1990
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.37.381
File:
PDF, 217 KB
1990
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