Development of Low-Temperature and High-Rate-Deposition Technology for Ferrite Thin-Films using ECR Sputtering Apparatus designed for Mass Production
Yamamoto, Setsuo, Matsuura, Mitsuru, Okada, Shigenobu, Shimosato, YoshihiroVolume:
53
Year:
2006
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.53.679
File:
PDF, 1.00 MB
2006